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FANUC Alarm GUID-164 — SERVO Force sensor shared parity

FANUC GUID-164 (“SERVO Force sensor shared parity”): Force sensor shared parity error in shared memory. First check: Replace interface board.

Updated 2026-09-17 · LogrobotLM reference

Description

Force sensor shared parity error in shared memory.

Remedy

Replace interface board.

Related codes

GUID-162SERVO F-bus system emergencyGUID-163SERVO Force sensor watch dogGUID-165SERVO Force sensor local parityGUID-166SERVO Force sensor SIR1 SLC-2

Indicative field information — the robot manufacturer's manual and safety procedures always prevail. Never bypass a safety device; apply lockout/tagout (LOTO) before any physical intervention. How this reference is built →