FANUC Air flow sensor
FANUC spare part — Updated 2026-09-16
Also written “Airflowsensor”.
FANUC Air flow sensor — is referenced by 12 FANUC fault codes in the LogrobotLM catalogue — including PAIN-510, PAIN-514, PAIN-520. Those are the faults that put this part under suspicion; confirm the real cause against your robot's backup before ordering a replacement.
Fault codes that point to this part
Searching for a Air flow sensor? These FANUC faults name it among the parts to check. Open any one for the meaning and what to check — then confirm which cause is really yours before ordering.
- PAIN-510WARN …0 air flow rate detected
- PAIN-514WARN …Max. output has flow < setpoint
- PAIN-520WARN …0 air flow rate timeout
- PAIN-540WARN …0 air flow rate detected
- PAIN-544WARN …Max. output has flow < setpoint
- PAIN-550WARN …0 air flow rate timeout
- PNT1-626Max. output has flow < setpoint
- PNT2-6220 air flow rate detected
- PNT2-626Max. output has flow < setpoint
- PNT2-6320 air flow rate timeout
- PNT2-657Max. output has flow < setpoint
- PNT2-6630 air flow rate timeout
Often diagnosed together
Parts cited by the same faults as Air flow sensor — check the whole chain before concluding. · Organes cités par les mêmes défauts que Air flow sensor.
Indicative field information — the robot manufacturer's manual and safety procedures always prevail. Never bypass a safety device; apply lockout/tagout (LOTO) before any physical intervention. How this reference is built →